郭金玉,王东琴,李元

• 1:沈阳化工大学信息工程学院

摘要(Abstract)：

为了提高局部保持投影(LPP)算法在各模态离散程度差异较大的多模态过程中故障检测性能,提出了一种新的基于二阶差商LPP(SODQ-LPP)的多模态过程故障检测方法。首先对多模态过程训练数据进行二阶差商预处理,消除模态间的方差差异,然后运用LPP算法进行降维和特征提取,计算样本的统计量,并利用核密度估计(KDE)确定控制限。对于新来的校验样本数据进行二阶差商处理后,向LPP模型上进行投影,计算新数据的统计量并与控制限比较进行故障检测。最后通过多模态数值例子和半导体过程数据的仿真实验结果验证了该算法的有效性。

关键词(KeyWords)： 故障检测;多模态过程;局部保持投影;二阶差商

Abstract:

Keywords:

基金项目(Foundation): 国家自然科学基金重大项目(61490701);国家自然科学基金(61673279);; 辽宁省教育厅项目(LJ2019007)

作者(Author): 郭金玉,王东琴,李元

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