武朝艳¹,魏晨军²,杨立峰²,锁显³

• 1:浙大城市学院 "双碳"研究中心， 浙江 杭州 310015
• 2:浙江大学 化学工程与生物工程学院， 浙江 杭州 310027
• 3:浙江大学杭州国际科创中心， 浙江 杭州 311200

摘要(Abstract)：

高纯电子化学品是半导体、平板显示和光伏等领域专用的精细化学品,产品纯度和品质要求高,目前国产化率较低。文中介绍了电子特气、湿电子化学品和光刻胶等电子化学品的种类、结构功能及品质要求,重点剖析了关键电子化学品的纯度及杂质限量指标,分类分析了电子化学品的产业规模、竞争格局与行业壁垒。综述了亚沸精馏、反应精馏、吸附分离、膜分离等技术在高纯度电子化学品制备中的研究进展,探讨了电子化学品中痕量杂质深度脱除的体系特点和分离难点,以及各技术的分离机理及其优缺点,归纳总结了吸附/膜等分离材料结构与金属脱除性能的关系。面向电子化学品国产化的迫切需求,浅析了电子化学品分离纯化及先进制造领域有待解决的关键技术挑战,以及教育、科技、人才一体化发展推动电子化学品技术创新的重要趋势。

关键词(KeyWords)： 电子化学品;分离纯化;电子特气;湿电子化学品;光刻胶

Abstract:

Keywords:

基金项目(Foundation): 浙江省"尖兵""领雁"科技计划(2023C01107)。

作者(Author): 武朝艳¹,魏晨军²,杨立峰²,锁显³

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