郑华均,钟金环,郑正德,王醒东

• 1:浙江工业大学化工与材料学院纳米科学与技术工程研究中心

摘要(Abstract)：

通过电化学阳极氧化-化学溶蚀技术制备了一种由无数纳米凸点和凹点所构成的新型铝基纳米点阵模板。采用直流反应磁控溅射法在这种新型模板上沉积得到氧化锌纳米结构薄膜。在室温下观察了氧化锌纳米结构薄膜的形貌,测定材料的晶体结构和光致发光(PL)性能,并讨论了不同溅射时间下制备的氧化锌纳米阵列结构以及其对氧化锌PL谱的性能影响。结果表明,采用直流反应磁控溅射-铝基纳米点阵模板可以制备ZnO纳米结构薄膜;PL谱表明溅射时间为10min得到的氧化锌薄膜在396.5nm和506.4nm处分别出现紫外发射峰和蓝绿色荧光发射峰;随着溅射时间延长,氧化锌薄膜PL谱伴有红移现象且强度逐渐增强。这可能是由于改善了晶粒结构导致不能观测到ZnO薄膜的深能级发射峰所致。

关键词(KeyWords)： 铝基纳米点阵模板;直流反应磁控溅射;氧化锌薄膜;光致发光

Abstract:

Keywords:

基金项目(Foundation):

作者(Author): 郑华均,钟金环,郑正德,王醒东

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